Problem thermconitride1 SNF 2011-06-14 15:48:08: high process pressure

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Tue Jun 14 15:48:09 PDT 2011


running recipe NITVAR, 850C, 60sccm NH3, 300sccm DCS; 130mT, but only reaching 165mT.  




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