Shutdown thermconitride1 SNF 2011-06-23 12:39:20: DCS flow is steadily dropping

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Jun 23 12:39:21 PDT 2011


I noticed the pressure was actually tracking the setpoint and then realized it's because the DCS flow has steadily dropped from 300sccm to under 200sccm (monitored to confirm it's decreasing).  once tube has cooled I will remove my wafers.  




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