From cfchiang at snf.stanford.edu Tue Nov 15 23:28:43 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Tue, 15 Nov 2011 23:28:43 -0800 Subject: Problem thermconitride1 SNF 2011-11-15 23:28:43: boat issues Message-ID: (1) There are plenty of nitride (?) flakes on the boat which seems to be the reason causing particles (not the LSN bubbles) on the processed wafer surface. Time to vaccum the boat. (2) Boat is having probelm coming out. The tube can't boat out after counting down from standby program. Man power had to be involved to boat out successfully. This happened both yesterday and today. Today I heard the motor was making noise while pushing the tube out but in vain. However, the tube was able to boat out on its own after deposition recipe. From tberg at snf.stanford.edu Wed Nov 16 07:48:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Nov 2011 07:48:23 -0800 Subject: Problem thermconitride1 SNF 2011-11-15 23:28:43: boat issues Message-ID: Vacuumed up all flakes and replaced 2 boats. Did boat cal. If tube is not vented after standby it cannot come out. give it a bit more time. From grahamab at snf.stanford.edu Mon Nov 21 08:30:01 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:30:01 -0800 Subject: Comment thermconitride1 SNF 2011-11-21 08:30:00: measured large thickness variation Message-ID: Running LSNTEST for ~3hrs and got very large across-wafer and between-wafer variation. Up to 0.4um difference on a single wafer (average around 1.5um total) and around 0.2um difference in average value between wafers. Wafers were loaded every slot with 3 tube dummies in front. Similar run was done last week (same conditions, but wafers every other slot) and standard deviation of measurements on a single wafer was ~0.1um.