Problem thermconitride1 SNF 2011-11-15 23:28:43: boat issues

cfchiang at cfchiang at
Tue Nov 15 23:28:43 PST 2011

(1) There are plenty of nitride (?) flakes on the boat which seems to be the reason causing particles (not the LSN bubbles) on the processed wafer surface. Time to vaccum the boat.
(2) Boat is having probelm coming out. The tube can't boat out after counting down from standby program. Man power had to be involved to boat out successfully. This happened both yesterday and today. Today I heard the motor was making noise while pushing the tube out but in vain. However, the tube was able to boat out on its own after deposition recipe.

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