Comment thermconitride1 SNF 2011-11-21 08:30:00: measured large thickness variation

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon Nov 21 08:30:01 PST 2011


Running LSNTEST for ~3hrs and got very large across-wafer and between-wafer variation.  Up to 0.4um difference on a single wafer (average around 1.5um total) and around 0.2um difference in average value between wafers.  Wafers were loaded every slot with 3 tube dummies in front.  Similar run was done last week (same conditions, but wafers every other slot) and standard deviation of measurements on a single wafer was ~0.1um.  




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