From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-08-09 12:09:34: TGO issue Message-ID: <25070194.92.1344539374085.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-08-09 12:09:34: TGO issue Message-ID: <9955598.14.1344892883470.JavaMail.coral@shine> After swapping out parts and changing our version of software, Calcon has the CL96 communicating with the rest of the TGO system. From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-08-17 15:20:53: power glitch Message-ID: <5465229.149.1345242053942.JavaMail.coral@shine> pump off From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-08-17 15:20:53: power glitch Message-ID: <10049451.47.1345500928752.JavaMail.coral@shine> Sytem back up after power issue From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-09-25 07:52:38: badger interlock installed and tested Message-ID: <21690871.1.1348584758868.JavaMail.coral@shine> badger interlock installed and tested From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-10-09 02:04:17: TGO system in fault Message-ID: <18787490.13.1349773458939.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-10-09 02:04:17: TGO system in fault Message-ID: <17187645.1.1349790802111.JavaMail.coral@shine> TGO CL96 is functional again From grahamab at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube Message-ID: <24348778.27.1350347507222.JavaMail.coral@shine> running NEWLSN and no gas flow for DCS or NH3. aborted and retried with same result. WAFERS ARE STILL IN THE FURNACE. I'm assuming this is a simple switch reset of some sort, so my hope is to just retry first thing in the morning after maintenance staff has addressed it. please do not run any tests that flow any gas to the tube other than nitrogen. if such testing is needed, please just wait until wafers are removed. From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube Message-ID: <6549551.35.1350400701245.JavaMail.coral@shine> Modified recipe, lowered N2 flow to 1.o SLM from 1.5. 1.5 caused high set point error From grahamab at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-10-16 15:17:45: can't maintain proper pressure setpoint Message-ID: <16626665.53.1350425865804.JavaMail.coral@shine> NEWLSN unable to maintain proper pressure setpoint throughout length of recipe. pressure creeps to 260mTorr throughout ~2hr recipe. same problem as last year and has a large impact on dep rate. From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-10-17 13:18:10: Leak in gate valve Message-ID: <23002676.8.1350505091561.JavaMail.coral@shine> Pulled gate valve and exhaust lines and cleaned now gate valve has a leak From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-10-23 11:45:34: Cleaned burnbox-back up Message-ID: <3143040.43.1351017934770.JavaMail.coral@shine> Cleaned burnbox-back up From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-10-17 13:18:10: Leak in gate valve Message-ID: <17010396.44.1351018015788.JavaMail.coral@shine> Replaced bad oring no gate valve leak. Pumping speed may still be slow From lofaolain at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-10-24 13:22:29: tube apparently at atmosphere when I came to unload Message-ID: <10833943.75.1351110150685.JavaMail.coral@shine> The film was uneven across the wafers From chienyuc at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-10-25 20:23:47: No gas flow Message-ID: <15453910.108.1351221827728.JavaMail.coral@shine> Run N2 recipe but no DCS nor NH3 flow during dep phase. No deposition. From chienyuc at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-11-01 14:59:39: N2 recipe works fine Message-ID: <24156444.158.1351807179708.JavaMail.coral@shine> Ran N2 recipe with correct flow and pressure. dep rate ~30A/min. But the boat position may need calibration - not fully opened and enter BAD OPER phase when closed. It will eventually enter PUMPDOWN and pumped correctly but takes a while in BOAT IN phase. From qran at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-02 14:54:14: uniformity issue Message-ID: <31885811.190.1351893254795.JavaMail.coral@shine> ran LSNTEST for half an hour, target thickness is 200nm. The film is not unifom, 220nm in the center, while 240nm at top. From qran at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-02 15:05:51: additonal info for non-uniformity films Message-ID: <7570823.191.1351893951937.JavaMail.coral@shine> The deposition pressure is 241. From qran at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-05 18:04:55: leakcheck failed Message-ID: <23745090.38.1352167496167.JavaMail.coral@shine> ran LSNTEST, leak check failed three times. Base pressure is 20, in leak up step, the pressure goes up very fast, around 20/s. From bchui at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-11-05 19:21:27: Clarifying Qran's leakcheck-fail report Message-ID: <212212.41.1352172088084.JavaMail.coral@shine> the leakup pressure rose by 20mT every 10sec (or, every time the screen refreshed). I actually recommended to Qran to red-light the furnace; will do it now. (She tried 3 times to run her recipe and the leakcheck failed all 3 times so it's clear there's a problem.) From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-05 18:04:55: leakcheck failed Message-ID: <26866755.2.1352217096368.JavaMail.coral@shine> Base and leak rate are fine but pumping speed will not support NEWLSN recipe. It should be limited to N2 recipe until we get new pump From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-11-05 19:21:27: Clarifying Qran's leakcheck-fail report Message-ID: <24679125.3.1352217111387.JavaMail.coral@shine> Base and leak rate are fine but pumping speed will not support NEWLSN recipe. It should be limited to N2 recipe until we get new pump From chen0622 at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-07 11:11:32: no deposition Message-ID: <8010288.1.1352315493687.JavaMail.coral@shine> run both LSNTEST and N2 recipe. tube could not pass pressure test. no deposition. From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-11-07 13:47:40: Not pumping enough Message-ID: <21579068.2.1352324860754.JavaMail.coral@shine> Pump cannot maintain low enough pressure to run recipes. New pump should be here early next week. From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-11-19 08:53:00: removed pump Message-ID: <32404901.5.1353343981099.JavaMail.coral@shine> removed pump to make way for the new one to be delivered this week From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-12-03 06:12:47: replacing the pump Message-ID: <21795495.5.1354543967743.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-11-19 08:53:00: removed pump Message-ID: <11085825.6.1354543982882.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-07 11:11:32: no deposition Message-ID: <30959301.12.1354654451351.JavaMail.coral@shine> Hig pressure set point exceeded therefore no dep From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-10-25 20:23:47: No gas flow Message-ID: <23617072.13.1354654462468.JavaMail.coral@shine> Hig pressure set point exceeded therefore no dep From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-11-07 13:47:40: Not pumping enough Message-ID: <11103930.14.1354654527087.JavaMail.coral@shine> Pump replaced, leak rate and base pressure are good From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-12-03 06:12:47: replacing the pump Message-ID: <12225273.15.1354654540227.JavaMail.coral@shine> Pump replaced, leak rate and base pressure are good From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-11-01 14:59:39: N2 recipe works fine Message-ID: <14791603.16.1354654567496.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-12-04 12:56:40: needs test after pump replacement Message-ID: <27981389.17.1354654600815.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-12-04 16:09:33: running LSN test Message-ID: <7911231.19.1354666174698.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-12-05 09:02:21: LSN TEST Message-ID: <15955724.4.1354726941167.JavaMail.coral@shine> ran LSNTEST 00:15:00 expected ~1100Ang Actual 923ang 2.3 IR From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-12-04 16:09:33: running LSN test Message-ID: <10188622.5.1354726985597.JavaMail.coral@shine> ran LSNTEST 00:15:00 expected ~1100Ang Actual 923ang 2.3 IR From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-12-05 09:03:48: Running hi stess nitride test (N2) Message-ID: <16939205.6.1354727029016.JavaMail.coral@shine> N2 00:30:00 From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-12-05 09:03:48: Running hi stess nitride test (N2) Message-ID: <23838383.16.1354733291627.JavaMail.coral@shine> Ran N2 00:30:00 expected 1050 ang Actual 805ang IR=2.0 From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-12-04 12:56:40: needs test after pump replacement Message-ID: <10616280.17.1354733308805.JavaMail.coral@shine> test complete From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-02 15:05:51: additonal info for non-uniformity films Message-ID: <16108506.18.1354733324973.JavaMail.coral@shine> pump replaced From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-11-02 14:54:14: uniformity issue Message-ID: <7406511.19.1354733345180.JavaMail.coral@shine> pump replaced From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-10-24 13:22:29: tube apparently at atmosphere when I came to unload Message-ID: <13826919.20.1354733362348.JavaMail.coral@shine> pump replaced From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-10-24 01:48:52: tube pressure 200+ Message-ID: <33522601.21.1354733377487.JavaMail.coral@shine> pump replaced From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-10-17 03:28:13: problem in LSNTEST Message-ID: <25846518.22.1354733399706.JavaMail.coral@shine> pump replaced From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-10-16 15:17:45: can't maintain proper pressure setpoint Message-ID: <12141980.23.1354733415864.JavaMail.coral@shine> pump replaced From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-06-27 20:02:26: dummy wafer broke Message-ID: <32261429.24.1354733443142.JavaMail.coral@shine> dummy replaced From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-07-31 13:15:49: pieces of broken dummy wafer removed Message-ID: <13610862.25.1354733456270.JavaMail.coral@shine> logged From maurice at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-10-23 11:45:34: Cleaned burnbox-back up Message-ID: <24113881.26.1354733472437.JavaMail.coral@shine> logged From karthikv at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-12-10 11:10:41: Residual stress LSNTEST Message-ID: <31121760.0.1355166642129.JavaMail.coral@shine> Processed 4 wafers (1:15 hr) with LSNTEST to obtain 597 nm +- 38 nm film thickness and a residual stress of 22.4 MPa. From chienyuc at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-12-11 16:30:31: DCS and NH3 flow off Message-ID: <17009528.10.1355272231762.JavaMail.coral@shine> running N2 recipe and keep alarming. DCS set/actual=45/41 and NH3=160/182. Tube pressure is 200-202 mtorr and it's fine. From lofaolain at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-12-17 15:28:43: No deposition with LSNTEST Message-ID: <26435993.48.1355786923192.JavaMail.coral@shine> From hector at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-12-17 18:12:23: no DCS or NH3 Message-ID: <27910735.69.1355796743809.JavaMail.coral@shine> Ran LSNTEST and system is alarminhg because there is no gas flow. The temp was right and the tumbe pumped down, but the MFC showed that there was no flow of either gas and the system kept alarming. PLEASE check this if you can, I need nitride before the lab shutdown. Thank you From hector at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-12-17 21:57:46: no gas flow Message-ID: <22904160.70.1355810266972.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-12-11 16:30:31: DCS and NH3 flow off Message-ID: <6719912.73.1355844838528.JavaMail.coral@shine> Adjusted High setpoint, Base pressure and leak rate fine. Ran gas flows for both lowstress and stoiciometric and they flowed fine From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-12-17 15:28:43: No deposition with LSNTEST Message-ID: <22541557.74.1355844846606.JavaMail.coral@shine> Adjusted High setpoint, Base pressure and leak rate fine. Ran gas flows for both lowstress and stoiciometric and they flowed fine From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Problem thermconitride1 SNF 2012-12-17 18:12:23: no DCS or NH3 Message-ID: <6969072.75.1355844854673.JavaMail.coral@shine> Adjusted High setpoint, Base pressure and leak rate fine. Ran gas flows for both lowstress and stoiciometric and they flowed fine From tberg at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Shutdown thermconitride1 SNF 2012-12-17 21:57:46: no gas flow Message-ID: <7804711.76.1355844877852.JavaMail.coral@shine> Adjusted High setpoint, Base pressure and leak rate fine. Ran gas flows for both lowstress and stoiciometric and they flowed fine From lofaolain at snf.stanford.edu Sun Dec 23 09:25:50 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:50 -0000 Subject: Comment thermconitride1 SNF 2012-12-18 14:59:23: Successful Deposition Message-ID: <9732986.18.1355871564044.JavaMail.coral@shine> 70mins LSNTEST Gradient across wafer 580nm in center (uniform below). ~700nm close to flat.