Shutdown thermconitride1 SNF 2012-10-09 02:04:17: TGO system in fault
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012
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Shutdown thermconitride1 SNF 2012-10-09 02:04:17: TGO system in fault
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Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube
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TGO CL96 is functional again
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Shutdown thermconitride1 SNF 2012-10-09 02:04:17: TGO system in fault
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Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube
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