Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube

tberg at snf.stanford.edu tberg at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012


Modified recipe, lowered N2 flow to 1.o SLM from 1.5. 1.5 caused high set point error



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