Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube

tberg at snf.stanford.edu tberg at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012

Previous message: Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube
Next message: Problem thermconitride1 SNF 2012-10-16 15:17:45: can't maintain proper pressure setpoint
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Modified recipe, lowered N2 flow to 1.o SLM from 1.5. 1.5 caused high set point error

Previous message: Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube
Next message: Problem thermconitride1 SNF 2012-10-16 15:17:45: can't maintain proper pressure setpoint
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the thermconitride1-pcs mailing list