Problem thermconitride1 SNF 2012-10-16 15:17:45: can't maintain proper pressure setpoint

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012


NEWLSN unable to maintain proper pressure setpoint throughout length of recipe.  pressure creeps to 260mTorr throughout ~2hr recipe.  same problem as last year and has a large impact on dep rate.  



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