Problem thermconitride1 SNF 2012-11-02 14:54:14: uniformity issue

qran at snf.stanford.edu qran at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012


ran LSNTEST for half an hour, target thickness is 200nm. The film is not unifom, 220nm in the center, while 240nm at top. 



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