Problem thermconitride1 SNF 2012-11-07 11:11:32: no deposition

chen0622 at snf.stanford.edu chen0622 at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012


run both LSNTEST and N2 recipe.  tube could not pass pressure test.  no deposition.  



More information about the thermconitride1-pcs mailing list