Comment thermconitride1 SNF 2012-12-11 16:30:31: DCS and NH3 flow off

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012


running N2 recipe and keep alarming.  DCS set/actual=45/41 and NH3=160/182.  Tube pressure is 200-202 mtorr and it's fine.



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