Problem thermconitride1 SNF 2012-12-17 15:28:43: No deposition with LSNTEST

tberg at snf.stanford.edu tberg at snf.stanford.edu
Sun Dec 23 09:25:50 PST 2012


Adjusted High setpoint, Base pressure and leak rate fine. Ran gas
 flows for both lowstress and stoiciometric and they flowed fine



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