December 2012 Archives by subject

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Starting: Sun Dec 23 09:25:50 PST 2012
Ending: Sun Dec 23 09:25:50 PST 2012
Messages: 58

Comment thermconitride1 SNF 2012-06-27 20:02:26: dummy wafer broke maurice at snf.stanford.edu
Comment thermconitride1 SNF 2012-07-31 13:15:49: pieces of broken dummy wafer removed maurice at snf.stanford.edu
Comment thermconitride1 SNF 2012-09-25 07:52:38: badger interlock installed and tested tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-10-23 11:45:34: Cleaned burnbox-back up maurice at snf.stanford.edu
Comment thermconitride1 SNF 2012-10-23 11:45:34: Cleaned burnbox-back up tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-10-24 01:48:52: tube pressure 200+ maurice at snf.stanford.edu
Comment thermconitride1 SNF 2012-11-01 14:59:39: N2 recipe works fine tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-11-01 14:59:39: N2 recipe works fine chienyuc at snf.stanford.edu
Comment thermconitride1 SNF 2012-11-19 08:53:00: removed pump tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-11-19 08:53:00: removed pump tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-12-03 06:12:47: replacing the pump tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-12-03 06:12:47: replacing the pump tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-12-05 09:02:21: LSN TEST maurice at snf.stanford.edu
Comment thermconitride1 SNF 2012-12-10 11:10:41: Residual stress LSNTEST karthikv at snf.stanford.edu
Comment thermconitride1 SNF 2012-12-11 16:30:31: DCS and NH3 flow off chienyuc at snf.stanford.edu
Comment thermconitride1 SNF 2012-12-11 16:30:31: DCS and NH3 flow off tberg at snf.stanford.edu
Comment thermconitride1 SNF 2012-12-18 14:59:23: Successful Deposition lofaolain at snf.stanford.edu
Problem thermconitride1 SNF 2012-10-16 15:17:45: can't maintain proper pressure setpoint maurice at snf.stanford.edu
Problem thermconitride1 SNF 2012-10-16 15:17:45: can't maintain proper pressure setpoint grahamab at snf.stanford.edu
Problem thermconitride1 SNF 2012-10-17 03:28:13: problem in LSNTEST maurice at snf.stanford.edu
Problem thermconitride1 SNF 2012-10-24 13:22:29: tube apparently at atmosphere when I came to unload lofaolain at snf.stanford.edu
Problem thermconitride1 SNF 2012-10-24 13:22:29: tube apparently at atmosphere when I came to unload maurice at snf.stanford.edu
Problem thermconitride1 SNF 2012-10-25 20:23:47: No gas flow chienyuc at snf.stanford.edu
Problem thermconitride1 SNF 2012-10-25 20:23:47: No gas flow tberg at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-02 14:54:14: uniformity issue qran at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-02 14:54:14: uniformity issue maurice at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-02 15:05:51: additonal info for non-uniformity films maurice at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-02 15:05:51: additonal info for non-uniformity films qran at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-05 18:04:55: leakcheck failed qran at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-05 18:04:55: leakcheck failed tberg at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-07 11:11:32: no deposition tberg at snf.stanford.edu
Problem thermconitride1 SNF 2012-11-07 11:11:32: no deposition chen0622 at snf.stanford.edu
Problem thermconitride1 SNF 2012-12-04 12:56:40: needs test after pump replacement maurice at snf.stanford.edu
Problem thermconitride1 SNF 2012-12-04 12:56:40: needs test after pump replacement tberg at snf.stanford.edu
Problem thermconitride1 SNF 2012-12-17 15:28:43: No deposition with LSNTEST tberg at snf.stanford.edu
Problem thermconitride1 SNF 2012-12-17 15:28:43: No deposition with LSNTEST lofaolain at snf.stanford.edu
Problem thermconitride1 SNF 2012-12-17 18:12:23: no DCS or NH3 hector at snf.stanford.edu
Problem thermconitride1 SNF 2012-12-17 18:12:23: no DCS or NH3 tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-08-09 12:09:34: TGO issue maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-08-09 12:09:34: TGO issue maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-08-17 15:20:53: power glitch maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-08-17 15:20:53: power glitch maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-10-09 02:04:17: TGO system in fault tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-10-09 02:04:17: TGO system in fault maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube grahamab at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-10-15 17:31:46: no gas flow; wafers still in tube tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-10-17 13:18:10: Leak in gate valve tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-10-17 13:18:10: Leak in gate valve tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-11-05 19:21:27: Clarifying Qran's leakcheck-fail report bchui at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-11-05 19:21:27: Clarifying Qran's leakcheck-fail report tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-11-07 13:47:40: Not pumping enough tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-11-07 13:47:40: Not pumping enough tberg at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-12-04 16:09:33: running LSN test maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-12-04 16:09:33: running LSN test maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-12-05 09:03:48: Running hi stess nitride test (N2) maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-12-05 09:03:48: Running hi stess nitride test (N2) maurice at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-12-17 21:57:46: no gas flow hector at snf.stanford.edu
Shutdown thermconitride1 SNF 2012-12-17 21:57:46: no gas flow tberg at snf.stanford.edu

Last message date: Sun Dec 23 09:25:50 PST 2012
Archived on: Sun Dec 23 09:26:00 PST 2012

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