From tberg at snf.stanford.edu Mon Jun 4 06:36:05 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 4 Jun 2012 06:36:05 -0700 Subject: Shutdown thermconitride1 SNF 2012-05-31 16:48:09: not venting: MY WAFERS ARE INSIDE! Message-ID: cleaned gate gvalve checked operation. base is good leak is good. it vents fine From grahamab at snf.stanford.edu Wed Jun 27 20:02:27 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 27 Jun 2012 20:02:27 -0700 Subject: Comment thermconitride1 SNF 2012-06-27 20:02:26: dummy wafer broke Message-ID: rear-most 4" dummy wafer broke when I tried to remove it with the wand. after removing the two pieces, it looks like it should have been replaced long ago. it's so rough that you can't even tell which side was once polished. adding another dummy (or replacing the other two as well) might be nice.