From dwnam at snf.stanford.edu Tue May 1 23:50:17 2012 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Tue, 1 May 2012 23:50:17 -0700 Subject: Comment thermconitride1 SNF 2012-05-01 23:50:17: Leak Check Fail Message-ID: Leak check has failed. Process stoped. From tberg at snf.stanford.edu Wed May 2 08:00:03 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 May 2012 08:00:03 -0700 Subject: Comment thermconitride1 SNF 2012-05-01 23:50:17: Leak Check Fail Message-ID: Did boat cal. Ran stbynit . pumped down fine leak good From tberg at snf.stanford.edu Fri May 4 06:09:40 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 May 2012 06:09:40 -0700 Subject: Comment thermconitride1 SNF 2011-04-23 21:35:57: poor uniformity Message-ID: running From tberg at snf.stanford.edu Fri May 4 06:09:49 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 May 2012 06:09:49 -0700 Subject: Problem thermconitride1 SNF 2012-04-23 08:34:51: needs test Message-ID: running running From popomoo at snf.stanford.edu Tue May 8 17:33:30 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Tue, 8 May 2012 17:33:30 -0700 Subject: Comment thermconitride1 SNF 2012-05-08 17:33:29: film thickness update Message-ID: for (LSNTEST, 3hr) run - top: 1115 nm - center: 1058 nm - left / right : 1062 nm - botton: 1051 nm From nxs4059 at snf.stanford.edu Fri May 11 11:15:02 2012 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Fri, 11 May 2012 11:15:02 -0700 Subject: Problem thermconitride1 SNF 2012-05-11 11:15:01: Tube had trouble opening & closing, program froze Message-ID: The tube aparently had trouble opening and closing. Aftre closing the program stopped at the "BOATIN4" routine and did not continue From maurice at snf.stanford.edu Fri May 11 15:27:15 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 May 2012 15:27:15 -0700 Subject: Shutdown thermconitride1 SNF 2012-05-11 15:27:14: Lo NH3 Message-ID: From seymour at snf.stanford.edu Tue May 15 09:55:23 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 15 May 2012 09:55:23 -0700 Subject: Shutdown thermconitride1 SNF 2012-05-11 15:27:14: Lo NH3 Message-ID: ammonia passed leak check and the tool needs a test From seymour at snf.stanford.edu Tue May 15 09:56:05 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 15 May 2012 09:56:05 -0700 Subject: Problem thermconitride1 SNF 2012-05-15 09:56:05: needs test after ammonis cylinder change Message-ID: From chen0622 at snf.stanford.edu Wed May 16 12:09:55 2012 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Wed, 16 May 2012 12:09:55 -0700 Subject: Problem thermconitride1 SNF 2012-05-16 12:09:54: boat would not close Message-ID: From tberg at snf.stanford.edu Thu May 17 06:18:32 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 May 2012 06:18:32 -0700 Subject: Shutdown thermconitride1 SNF 2012-05-17 06:18:32: No DCS Message-ID: Cylinder will need to be changed From tberg at snf.stanford.edu Thu May 17 07:08:26 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 May 2012 07:08:26 -0700 Subject: Comment thermconitride1 SNF 2012-05-17 07:08:26: DCS Cylinder changed in leak check Message-ID: DCS Cylinder changed in leak check From tberg at snf.stanford.edu Fri May 18 06:19:46 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 06:19:46 -0700 Subject: Shutdown thermconitride1 SNF 2012-05-17 06:18:32: No DCS Message-ID: DCS changed leak check OK back on now From tberg at snf.stanford.edu Fri May 18 06:19:54 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 06:19:54 -0700 Subject: Comment thermconitride1 SNF 2012-05-17 07:08:26: DCS Cylinder changed in leak check Message-ID: DCS changed leak check OK back on now From tberg at snf.stanford.edu Fri May 18 07:37:59 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 07:37:59 -0700 Subject: Problem thermconitride1 SNF 2012-05-16 12:09:54: boat would not close Message-ID: Replaced boatloader board did boat cal and temp cal. In stbynit From tberg at snf.stanford.edu Fri May 18 07:38:46 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 07:38:46 -0700 Subject: Problem thermconitride1 SNF 2012-05-11 11:15:01: Tube had trouble opening & closing, program froze Message-ID: Replaced boat loader board did boat cal and temp cal fine From tberg at snf.stanford.edu Fri May 18 07:39:11 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 07:39:11 -0700 Subject: Problem thermconitride1 SNF 2012-05-15 09:56:05: needs test after ammonis cylinder change Message-ID: numerous runs after cylinder change From nxs4059 at snf.stanford.edu Thu May 31 16:48:10 2012 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Thu, 31 May 2012 16:48:10 -0700 Subject: Shutdown thermconitride1 SNF 2012-05-31 16:48:09: not venting: MY WAFERS ARE INSIDE! Message-ID: Process is complete, but tube wont open. Mourice says it's likely the gatevalve is not closing. I HAVE 21 WAFERS INSIDE (and I would like them back, when it is opened please contact me!) Nate (Nxs4059 at snf.stanford.edu)