From lwhittel at comcast.net  Fri Feb  1 12:07:56 2013
From: lwhittel at comcast.net (lwhittel at comcast.net)
Date: Fri, 1 Feb 2013 12:07:56 -0800 (PST)
Subject: [thermconitride1-pcs] Problem thermconitride1 SNF 2013-02-01
 12:07:55: tube is out and has been for about 30 minutes
Message-ID: <21563474.14.1359749276208.JavaMail.coral@snc-coraldb.stanford.edu>


From tberg at stanford.edu  Thu Feb  7 09:14:03 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Thu, 7 Feb 2013 09:14:03 -0800 (PST)
Subject: [thermconitride1-pcs] Comment thermconitride1 SNF 2012-12-10
 11:10:41: Residual stress LSNTEST
Message-ID: <7544419.96.1360257243749.JavaMail.coral@snc-coraldb.stanford.edu>

noted

From tberg at stanford.edu  Thu Feb  7 09:14:20 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Thu, 7 Feb 2013 09:14:20 -0800 (PST)
Subject: [thermconitride1-pcs] Comment thermconitride1 SNF 2012-12-18
 14:59:23: Successful Deposition
Message-ID: <15621523.97.1360257260795.JavaMail.coral@snc-coraldb.stanford.edu>

noted

From tberg at stanford.edu  Thu Feb  7 09:14:41 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Thu, 7 Feb 2013 09:14:41 -0800 (PST)
Subject: [thermconitride1-pcs] Problem thermconitride1 SNF 2013-01-07
	14:51:23: needs test
Message-ID: <32818470.98.1360257281848.JavaMail.coral@snc-coraldb.stanford.edu>

still needs test

From tberg at stanford.edu  Thu Feb  7 09:15:27 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Thu, 7 Feb 2013 09:15:27 -0800 (PST)
Subject: [thermconitride1-pcs] Shutdown thermconitride1 SNF 2013-01-09
 15:23:25: test thick/pressure high
Message-ID: <23020334.99.1360257327953.JavaMail.coral@snc-coraldb.stanford.edu>

Pressure issues resolved, Trap cleaned leak resolved. Needs test

From tberg at stanford.edu  Thu Feb  7 09:15:50 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Thu, 7 Feb 2013 09:15:50 -0800 (PST)
Subject: [thermconitride1-pcs] Problem thermconitride1 SNF 2013-02-01
 12:07:55: tube is out and has been for about 30 minutes
Message-ID: <20687259.100.1360257350010.JavaMail.coral@snc-coraldb.stanford.edu>

back in standby

From tberg at stanford.edu  Thu Feb  7 09:16:07 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Thu, 7 Feb 2013 09:16:07 -0800 (PST)
Subject: [thermconitride1-pcs] Problem thermconitride1 SNF 2013-02-07
 09:16:06: Needs test after repair
Message-ID: <33299838.101.1360257367057.JavaMail.coral@snc-coraldb.stanford.edu>


From maurice at stanford.edu  Thu Feb  7 10:29:53 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Thu, 7 Feb 2013 10:29:53 -0800 (PST)
Subject: [thermconitride1-pcs] Comment thermconitride1 SNF 2013-02-07
	10:29:53: running LSN test
Message-ID: <12014701.107.1360261793923.JavaMail.coral@snc-coraldb.stanford.edu>

LSNTEST  00:15:00
expect ~950ang

From maurice at stanford.edu  Thu Feb  7 15:23:53 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Thu, 7 Feb 2013 15:23:53 -0800 (PST)
Subject: [thermconitride1-pcs] Comment thermconitride1 SNF 2013-02-07
 10:29:53: running LSN test
Message-ID: <16112778.112.1360279433805.JavaMail.coral@snc-coraldb.stanford.edu>

LSNTEST  00:15:00
expect ~950ang
Actual 986 Ang
process pressure 100mtorr...control perfectly!

From maurice at stanford.edu  Thu Feb  7 15:24:09 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Thu, 7 Feb 2013 15:24:09 -0800 (PST)
Subject: [thermconitride1-pcs] Problem thermconitride1 SNF 2013-02-07
 09:16:06: Needs test after repair
Message-ID: <24336017.113.1360279449848.JavaMail.coral@snc-coraldb.stanford.edu>

LSNTEST  00:15:00
expect ~950ang
Actual 986 Ang
process pressure 100mtorr...control perfectly!

From lwhittel at comcast.net  Thu Feb 21 11:41:33 2013
From: lwhittel at comcast.net (lwhittel at comcast.net)
Date: Thu, 21 Feb 2013 11:41:33 -0800 (PST)
Subject: [thermconitride1-pcs] Comment thermconitride1 SNF 2013-02-21
 11:41:33: middle TC alarming during dep every 1-2 min
Message-ID: <4489618.25.1361475693943.JavaMail.coral@snc-coraldb.stanford.edu>

The middle TC is alarming every one to two minutes during the nitride deposition step.