From ofaolain at stanford.edu  Wed Mar  6 14:13:52 2013
From: ofaolain at stanford.edu (ofaolain at stanford.edu)
Date: Wed, 6 Mar 2013 14:13:52 -0800 (PST)
Subject: [thermconitride1-pcs] Comment thermconitride1 SNF 2013-03-06
 14:13:52: 10nm variaton across wafer
Message-ID: <15193134.69.1362608032488.JavaMail.coral@snc-coraldb.stanford.edu>

LSNtest
295nm at top
285nm in middle

From qran at stanford.edu  Sun Mar 17 22:19:12 2013
From: qran at stanford.edu (qran at stanford.edu)
Date: Sun, 17 Mar 2013 22:19:12 -0700 (PDT)
Subject: [thermconitride1-pcs] Comment thermconitride1 SNF 2013-03-17
	22:19:12: process pressure
Message-ID: <28431060.76.1363583952773.JavaMail.coral@snc-coraldb.stanford.edu>

Ran LSNTEST recipe for 12 min. The process pressure is 217, much higher than other records (100). But the pressure was stable in the process. Thickness is 1000A as expected, uniformity is on the same wafer is around ~2A.

From maurice at stanford.edu  Wed Mar 27 14:51:49 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Wed, 27 Mar 2013 14:51:49 -0700 (PDT)
Subject: [thermconitride1-pcs] Shutdown thermconitride1 SNF 2013-03-27
	14:51:48: DCS
Message-ID: <14996351.28.1364421109311.JavaMail.coral@snc-coraldb.stanford.edu>

Ray has replaced the chiller.  We are waiting for the bottle to cool and for the pressure to come down.

From maurice at stanford.edu  Thu Mar 28 09:43:51 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Thu, 28 Mar 2013 09:43:51 -0700 (PDT)
Subject: [thermconitride1-pcs] Shutdown thermconitride1 SNF 2013-03-27
	14:51:48: DCS
Message-ID: <24627575.5.1364489031621.JavaMail.coral@snc-coraldb.stanford.edu>

chiller replaced