[thermconitride1-pcs] Problem thermconitride1 SNF 2014-02-10 16:20:39: DSC flucuating

maurice at stanford.edu maurice at stanford.edu
Mon Feb 10 16:20:40 PST 2014


Jim Kruger reports DCS setpoint is 45 but is is swinging between 36-49sccm while runninh N2 recipe.


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