[thermconitride1-pcs] Problem thermconitride1 SNF 2014-02-21 15:13:49: Dep rate a lot faster

vuhong at stanford.edu vuhong at stanford.edu
Fri Feb 21 15:13:50 PST 2014


Dep rate seems like it's getting a lot faster over the past week.
2:10:00 deposition with LSNTEST 
Last week: 1.4-1.5um. 
This week: 1.7-1.9um. 


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