[thermconitride1-pcs] Problem thermconitride1 SNF 2014-02-23 23:48:00: deposit rate is getting faster

ahn1229 at stanford.edu ahn1229 at stanford.edu
Sun Feb 23 23:48:00 PST 2014


deposited 1:40 (100min), and got 1.45~1.70um
Dep rate was approx. 100-110A/min, it's now ~150A/min. 
Previous user (Vu Hong) reported ~130A/min last week. 


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