From mdickey at snf.stanford.edu  Fri Aug 13 14:35:44 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 13 Aug 2004 14:35:44 -0700
Subject: Comment thermcopoly1 SNF 2004-08-13 14:35:44: Pump
Message-ID: <mailman.3.1356283568.4877.thermcopoly1-pcs@snf.stanford.edu>

Pump and blower replaced



From tberg at snf.stanford.edu  Wed Aug 18 08:03:38 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 18 Aug 2004 08:03:38 -0700
Subject: Comment thermcopoly1 SNF 2004-08-13 14:35:44: Pump
Message-ID: <mailman.4.1356283568.4877.thermcopoly1-pcs@snf.stanford.edu>

Pump Package changed looks ok now



From tberg at snf.stanford.edu  Wed Aug 18 08:09:45 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 18 Aug 2004 08:09:45 -0700
Subject: Comment thermcopoly1 SNF 2004-08-18 08:09:45: Poly620u test
Message-ID: <mailman.5.1356283568.4877.thermcopoly1-pcs@snf.stanford.edu>

Ran poly620u test results as follows:
Load waferafter 4 baffles-T-3199,C-3137,B-3133,L-3141,
R-3140
Rear wafer after 4 baffles-T-2999,C-2890,B-2891,L-2939
R-2960
Flow:SiH4-150, Pressure-200mT