Comment thermcopoly1 SNF 2004-08-18 08:09:45: Poly620u test

tberg at snf.stanford.edu tberg at snf.stanford.edu
Wed Aug 18 08:09:45 PDT 2004


Ran poly620u test results as follows:
Load waferafter 4 baffles-T-3199,C-3137,B-3133,L-3141,
R-3140
Rear wafer after 4 baffles-T-2999,C-2890,B-2891,L-2939
R-2960
Flow:SiH4-150, Pressure-200mT




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