From mdickey at snf.stanford.edu Tue Aug 1 06:42:55 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Aug 2006 06:42:55 -0700 Subject: Problem thermcopoly1 SNF 2006-07-31 21:17:42: Rubber Stain Message-ID: Vacuum wand replaced From kimsora at snf.stanford.edu Wed Aug 2 00:20:34 2006 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Wed, 2 Aug 2006 00:20:34 -0700 Subject: Problem thermcopoly1 SNF 2006-08-02 00:20:34: base pressure was so high. Message-ID: I ran P550B2H6. Usual value is around 15 for base pressure. But, I got 201 at this time. I did not get a leak check error even though the value was 198. The process went on. At deposition step, CLP and SIH4 in the computer monitor were red flashing. I deposited poly on my wafers. But, I am not sure if I got the right thickness. From maurice at snf.stanford.edu Wed Aug 2 14:03:51 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Aug 2006 14:03:51 -0700 Subject: Shutdown thermcopoly1 SNF 2006-08-02 14:03:50: failed STBYPOLY leakcheck Message-ID: From mdickey at snf.stanford.edu Wed Aug 2 14:47:51 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 2 Aug 2006 14:47:51 -0700 Subject: Comment thermcopoly1 SNF 2006-08-02 14:47:50: sheath Message-ID: Down for broken t.c. sheath...will change in the morning From mdickey at snf.stanford.edu Thu Aug 3 08:30:05 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 3 Aug 2006 08:30:05 -0700 Subject: Comment thermcopoly1 SNF 2006-08-03 08:30:03: Sheath Message-ID: Sheath has been replaced....element is heating up and in standby recipe From mdickey at snf.stanford.edu Thu Aug 3 09:44:04 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 3 Aug 2006 09:44:04 -0700 Subject: Shutdown thermcopoly1 SNF 2006-08-02 14:03:50: failed STBYPOLY leakcheck Message-ID: fixed From mdickey at snf.stanford.edu Thu Aug 3 09:44:18 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 3 Aug 2006 09:44:18 -0700 Subject: Comment thermcopoly1 SNF 2006-08-02 14:47:50: sheath Message-ID: replaced From mdickey at snf.stanford.edu Thu Aug 3 09:44:34 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 3 Aug 2006 09:44:34 -0700 Subject: Comment thermcopoly1 SNF 2006-08-03 08:30:03: Sheath Message-ID: replaced From maurice at snf.stanford.edu Fri Aug 4 15:15:52 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Aug 2006 15:15:52 -0700 Subject: Problem thermcopoly1 SNF 2006-08-02 00:20:34: base pressure was so high. Message-ID: Sheath has been replaced... From mdickey at snf.stanford.edu Thu Aug 24 09:22:56 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 24 Aug 2006 09:22:56 -0700 Subject: Shutdown thermcopoly1 SNF 2006-08-24 09:22:56: Sheath broken Message-ID: Down for broekn t.c. sheath From tberg at snf.stanford.edu Thu Aug 24 14:01:57 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Aug 2006 14:01:57 -0700 Subject: Shutdown thermcopoly1 SNF 2006-08-24 09:22:56: Sheath broken Message-ID: Mike replaced the shesth. Did leak check and put in standby From chozone at snf.stanford.edu Thu Aug 31 13:01:29 2006 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Thu, 31 Aug 2006 13:01:29 -0700 Subject: Problem thermcopoly1 SNF 2006-08-31 13:01:29: Pump pressure value is too high, >1000 Message-ID: But CLP value is fine. It also seems like work