Problem thermcopoly1 SNF 2006-08-02 00:20:34: base pressure was so high.

kimsora at snf.stanford.edu kimsora at snf.stanford.edu
Wed Aug 2 00:20:34 PDT 2006


I ran P550B2H6. Usual value is around 15 for base pressure. But, I got 201 at this time. I did not get a leak check error even though the value was 198. The process went on. At deposition step, CLP and SIH4 in the computer monitor were red flashing. 
I deposited poly on my wafers. But, I am not sure if I got the right thickness.  




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