From maurice at snf.stanford.edu Tue Jan 3 15:59:02 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Jan 2006 15:59:02 -0800 Subject: Shutdown thermcopoly1 SNF 2006-01-03 15:59:00: failed leakcheck Message-ID: running p550poly program for 01:40:00 tube not pumping down From maurice at snf.stanford.edu Wed Jan 4 14:16:47 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Jan 2006 14:16:47 -0800 Subject: Comment thermcopoly1 SNF 2006-01-04 14:16:46: failed leakcheck twice today Message-ID: normal base pressure is ~17mTorr today the base is 39mTorr From maurice at snf.stanford.edu Fri Jan 6 09:58:11 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 09:58:11 -0800 Subject: Comment thermcopoly1 SNF 2006-01-06 09:58:10: p580ph3 test good Message-ID: expected 960 deposited 932 Green light. I will run a B2H6 run to flow that dopant From maurice at snf.stanford.edu Fri Jan 6 09:58:39 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 09:58:39 -0800 Subject: Shutdown thermcopoly1 SNF 2006-01-03 15:59:00: failed leakcheck Message-ID: ok base pressure back to normal From maurice at snf.stanford.edu Fri Jan 6 09:58:58 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 09:58:58 -0800 Subject: Comment thermcopoly1 SNF 2006-01-04 14:16:46: failed leakcheck twice today Message-ID: logged From iwjung at snf.stanford.edu Mon Jan 30 14:57:01 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Mon, 30 Jan 2006 14:57:01 -0800 Subject: Comment thermcopoly1 SNF 2006-01-30 14:56:37: bad uniformity Message-ID: Ran P620PH3 with 4 sccm flow of PH3 for a target thickness of 4500A (3hrs). 20% thickness variation across wafers. Many rings visible at wafer edges.