Comment thermcopoly1 SNF 2006-01-30 14:56:37: bad uniformity

iwjung at snf.stanford.edu iwjung at snf.stanford.edu
Mon Jan 30 14:57:01 PST 2006


Ran P620PH3 with 4 sccm flow of PH3 for a target thickness of 4500A (3hrs). 20% thickness variation across wafers.  Many rings visible at wafer edges.




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