From junil at snf.stanford.edu Sat Jul 8 14:50:55 2006 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Sat, 8 Jul 2006 14:50:55 -0700 Subject: Problem thermcopoly1 SNF 2006-07-08 14:50:54: MUX CRT is not working Message-ID: The only thing that I can see on MUX CRT screen is '>>>'. I could not monitor tube status and load recipe to furnace. From dansanga at snf.stanford.edu Sat Jul 8 23:31:27 2006 From: dansanga at snf.stanford.edu (dansanga at snf.stanford.edu) Date: Sat, 8 Jul 2006 23:31:27 -0700 Subject: Problem thermcopoly1 SNF 2006-07-08 23:31:27: tube is failing leakcheck . Message-ID: tried twice to load but each time it is failing leakcheck. so stopped processing and maurice should look aT THE PROBLEM ON MONDAY. DAN From dansanga at snf.stanford.edu Sat Jul 8 23:58:02 2006 From: dansanga at snf.stanford.edu (dansanga at snf.stanford.edu) Date: Sat, 8 Jul 2006 23:58:02 -0700 Subject: Shutdown thermcopoly1 SNF 2006-07-08 23:57:59: SHUTTING DOWN SystEM Message-ID: CLOSE EXAMINATION OF RUBBER GASKET SHOWED BROKEN ITEMS ON THE END OF THE TUBE AS WELL AS WHAT LOOKS LLIKE GLASS DUST ON THE RUBBER SEAL. CAN SEE SOME BROKEN PIECES OF SOMETHING ON THE CANTELEVER BEAM AS WELL. SOMEONE LOOK AT THIS IN DETAIL. THIS MAY BE WHY IT WONT PASS LEAK CHECK. From mdickey at snf.stanford.edu Mon Jul 10 07:50:17 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Jul 2006 07:50:17 -0700 Subject: Comment thermcopoly1 SNF 2006-07-10 07:50:16: Sheath Message-ID: Down for t.c. sheath replacement From tberg at snf.stanford.edu Wed Jul 12 10:28:16 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:28:16 -0700 Subject: Problem thermcopoly1 SNF 2006-07-08 14:50:54: MUX CRT is not working Message-ID: Working fine now From tberg at snf.stanford.edu Wed Jul 12 10:28:49 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:28:49 -0700 Subject: Problem thermcopoly1 SNF 2006-07-08 23:31:27: tube is failing leakcheck . Message-ID: REplaced sheath/ leak checked From tberg at snf.stanford.edu Wed Jul 12 10:29:26 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:29:26 -0700 Subject: Shutdown thermcopoly1 SNF 2006-07-08 23:57:59: SHUTTING DOWN SystEM Message-ID: Replaced sheath-needs test From tberg at snf.stanford.edu Wed Jul 12 10:29:31 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:29:31 -0700 Subject: Shutdown thermcopoly1 SNF 2006-07-08 23:57:59: SHUTTING DOWN SystEM Message-ID: Replaced sheath-needs test From tberg at snf.stanford.edu Wed Jul 12 10:30:24 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:30:24 -0700 Subject: Comment thermcopoly1 SNF 2006-07-10 07:50:16: Sheath Message-ID: Replaced From tberg at snf.stanford.edu Wed Jul 12 10:35:48 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:35:48 -0700 Subject: Problem thermcopoly1 SNF 2006-07-12 10:35:44: Needs test after Sheath change Message-ID: From dwburns at snf.stanford.edu Thu Jul 13 01:33:35 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Thu, 13 Jul 2006 01:33:35 -0700 Subject: Problem thermcopoly1 SNF 2006-07-13 01:33:34: Failed Leak Check 3X Message-ID: System failed leak check marginally three times. Suggest continuing pumpout cycle and try again. From dwburns at snf.stanford.edu Thu Jul 13 07:36:29 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Thu, 13 Jul 2006 07:36:29 -0700 Subject: Comment thermcopoly1 SNF 2006-07-13 07:36:28: Process Ran on 4th Try Message-ID: Looks OK. From tberg at snf.stanford.edu Fri Jul 14 06:20:02 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Jul 2006 06:20:02 -0700 Subject: Problem thermcopoly1 SNF 2006-07-12 10:35:44: Needs test after Sheath change Message-ID: Running fine after injector change From tberg at snf.stanford.edu Fri Jul 14 06:20:12 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Jul 2006 06:20:12 -0700 Subject: Problem thermcopoly1 SNF 2006-07-13 01:33:34: Failed Leak Check 3X Message-ID: Resolved From tberg at snf.stanford.edu Fri Jul 14 06:20:22 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Jul 2006 06:20:22 -0700 Subject: Comment thermcopoly1 SNF 2006-07-13 07:36:28: Process Ran on 4th Try Message-ID: noted From dwburns at snf.stanford.edu Mon Jul 24 10:22:14 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Mon, 24 Jul 2006 10:22:14 -0700 Subject: Problem thermcopoly1 SNF 2006-07-24 10:22:12: PH3=1 Produces Alarm and Reads 0.0 Message-ID: Program P620PH3 with PH3=1 produces a PH3 alarm and "0.0" for the display value. Suspect that the PH3 flow may be actually be zero. Previous users with PH3 setting of 2.0 showed a screen display value of 2.0 during the deposition, as expected. A PH3 setting of 10 also reads 10.0 on the display during the deposition. From maurice at snf.stanford.edu Fri Jul 28 15:04:37 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Jul 2006 15:04:37 -0700 Subject: Comment thermcopoly1 SNF 2006-07-28 15:04:36: Temp stab step Message-ID: I have reduced the temperature stabilixation step from 20 minutes to 3 minutes. The program was written to hold the timer until your temperature is reached then wait an additional 20 min for it to stabilize. It will now only wait 3 min to stabilize. I and several other users have watched the program and we think this time ok. Please contact me if you notice any problems. All Thermcopoly runs will be 17 min shorter. -m From me342e at snf.stanford.edu Sun Jul 30 09:48:16 2006 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Sun, 30 Jul 2006 09:48:16 -0700 Subject: Problem thermcopoly1 SNF 2006-07-30 09:48:15: computer controller cannot return to menu mode Message-ID: The computer is in a prompt ">>>" mode. Cannot exit back to main menu. Not sure how the mode was initialized, but remember accidently pressing g on the "Input:" line. Could not load standby recipe, so to close the tube, ran previous process. From tberg at snf.stanford.edu Mon Jul 31 07:27:35 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 31 Jul 2006 07:27:35 -0700 Subject: Problem thermcopoly1 SNF 2006-07-30 09:48:15: computer controller cannot return to menu mode Message-ID: No problem found From tberg at snf.stanford.edu Mon Jul 31 14:16:04 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 31 Jul 2006 14:16:04 -0700 Subject: Problem thermcopoly1 SNF 2006-07-24 10:22:12: PH3=1 Produces Alarm and Reads 0.0 Message-ID: Calibrated flow From me342f at snf.stanford.edu Mon Jul 31 21:17:42 2006 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Mon, 31 Jul 2006 21:17:42 -0700 Subject: Problem thermcopoly1 SNF 2006-07-31 21:17:42: Rubber Stain Message-ID: During loading wafer, rubber tube touched cantilever. There was small rubber stain and partially cleaned. Also there is no white button in vacuum tweezer.