Problem thermcopoly1 SNF 2006-07-24 10:22:12: PH3=1 Produces Alarm and Reads 0.0

dwburns at snf.stanford.edu dwburns at snf.stanford.edu
Mon Jul 24 10:22:14 PDT 2006


Program P620PH3 with PH3=1 produces a PH3 alarm and "0.0" for the display value.  Suspect that the PH3 flow may be actually be zero.  Previous users with PH3 setting of 2.0 showed a screen display value of 2.0 during the deposition, as expected.  A PH3 setting of 10 also reads 10.0 on the display during the deposition.




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