Problem thermcopoly1 SNF 2006-07-31 21:17:42: Rubber Stain

me342f at snf.stanford.edu me342f at snf.stanford.edu
Mon Jul 31 21:17:42 PDT 2006


During loading wafer, rubber tube touched cantilever. There was small rubber stain and partially cleaned. 
Also there is no white button in vacuum tweezer.




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