From kimsora at snf.stanford.edu Sat Nov 11 15:50:58 2006 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 11 Nov 2006 15:50:58 -0800 Subject: Comment thermcopoly1 SNF 2006-11-11 15:50:57: dummy wafers Message-ID: are getting too thick for the boat slots From kimsora at snf.stanford.edu Sat Nov 11 20:46:43 2006 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 11 Nov 2006 20:46:43 -0800 Subject: Problem thermcopoly1 SNF 2006-11-11 20:46:42: We ran of SiH4 gas. Message-ID: I ran P550B2H6. The machine was hold at the deposition step. There was no flow of SiH4 gas. From maurice at snf.stanford.edu Mon Nov 13 10:42:41 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Nov 2006 10:42:41 -0800 Subject: Shutdown thermcopoly1 SNF 2006-11-13 10:42:40: user reports no SiH4 Message-ID: From maurice at snf.stanford.edu Wed Nov 15 10:15:03 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Nov 2006 10:15:03 -0800 Subject: Comment thermcopoly1 SNF 2006-11-15 10:15:02: status 11/15/06 Message-ID: Thermco poly has an issue with satisfying interlocks that let the gases flow. Ted and his crew are working on it (along with epi burn box, epi isolation valve, new AMAT mfc change, the TEL instillation...). Thermco poly is not currently at the top of the priority list, but it will be addressed as soon as time allows. We will update you when we have more information. -m From maurice at snf.stanford.edu Wed Nov 15 10:19:15 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Nov 2006 10:19:15 -0800 Subject: Problem thermcopoly1 SNF 2006-11-11 20:46:42: We ran of SiH4 gas. Message-ID: this now written as a shutdown From tberg at snf.stanford.edu Thu Nov 16 08:50:20 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Nov 2006 08:50:20 -0800 Subject: Comment thermcopoly1 SNF 2006-11-16 08:50:19: Chips ordered for possible fix Message-ID: From tberg at snf.stanford.edu Mon Nov 20 08:45:07 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Nov 2006 08:45:07 -0800 Subject: Shutdown thermcopoly1 SNF 2006-11-13 10:42:40: user reports no SiH4 Message-ID: Replaced IC on CVD interface board From tberg at snf.stanford.edu Mon Nov 20 08:46:00 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Nov 2006 08:46:00 -0800 Subject: Comment thermcopoly1 SNF 2006-11-15 10:15:02: status 11/15/06 Message-ID: Replaced IC 16 on CVD interface board .chgecked SiH4 flow From tberg at snf.stanford.edu Mon Nov 20 08:46:13 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Nov 2006 08:46:13 -0800 Subject: Comment thermcopoly1 SNF 2006-11-16 08:50:19: Chips ordered for possible fix Message-ID: Replaced IC