Problem thermcopoly1 SNF 2006-11-11 20:46:42: We ran of SiH4 gas.

kimsora at snf.stanford.edu kimsora at snf.stanford.edu
Sat Nov 11 20:46:43 PST 2006


I ran P550B2H6. The machine was hold at the deposition step. There was no flow of SiH4 gas.  




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