Shutdown thermcopoly1 SNF 2006-11-13 10:42:40: user reports no SiH4
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Nov 20 08:45:07 PST 2006
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Shutdown thermcopoly1 SNF 2006-11-13 10:42:40: user reports no SiH4
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Comment thermcopoly1 SNF 2006-11-15 10:15:02: status 11/15/06
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Replaced IC on CVD interface board
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Shutdown thermcopoly1 SNF 2006-11-13 10:42:40: user reports no SiH4
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Comment thermcopoly1 SNF 2006-11-15 10:15:02: status 11/15/06
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