Problem thermcopoly1 SNF 2007-04-29 16:38:52: BOAT IN problem

ericp at snf.stanford.edu ericp at snf.stanford.edu
Sun Apr 29 16:38:53 PDT 2007


When we start the recipe, the boat starts going in, 
and then stops and reverses several times during the 
push.  Eventually, it goes in and begins to pump.  
At some point, the boat motor starts driving (but can't
move because of tube vacuum).  Computer shows
"BT STAL3" error. 
The first run appears to have died in the middle of 
deposition.  Some poly was deposited, but less
than half of expected.  Not sure if this problem is 
related to BT STAL3 error. 
 




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