From maurice at snf.stanford.edu  Mon Feb  5 14:10:35 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 5 Feb 2007 14:10:35 -0800
Subject: Problem thermcopoly1 SNF 2007-02-05 14:10:35: slots too tight
Message-ID: <mailman.126.1356283569.4877.thermcopoly1-pcs@snf.stanford.edu>

Because there is a lot of deposition on the boats, can't easily get wafers in and out of slots in both boats



From tberg at snf.stanford.edu  Thu Feb  8 06:35:54 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 8 Feb 2007 06:35:54 -0800
Subject: Problem thermcopoly1 SNF 2007-02-05 14:10:35: slots too tight
Message-ID: <mailman.127.1356283569.4877.thermcopoly1-pcs@snf.stanford.edu>

boats replaced



From tberg at snf.stanford.edu  Thu Feb  8 06:36:20 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 8 Feb 2007 06:36:20 -0800
Subject: Comment thermcopoly1 SNF 2006-11-11 15:50:57: dummy wafers
Message-ID: <mailman.128.1356283569.4877.thermcopoly1-pcs@snf.stanford.edu>

boat replaced