From king at snf.stanford.edu Mon Jun 4 18:03:34 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 4 Jun 2007 18:03:34 -0700 Subject: Problem thermcopoly1 SNF 2007-06-04 18:03:30: pumpdown woes Message-ID: The boat assembly may need adjustment as it seems to come out too far and then doesn't pump down after loading. Gently pushing the assembly doesn't help. O-ring is seated well. Have tried three times along with other users. From tberg at snf.stanford.edu Tue Jun 5 08:28:34 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 5 Jun 2007 08:28:34 -0700 Subject: Problem thermcopoly1 SNF 2007-06-04 18:03:30: pumpdown woes Message-ID: Did boat cal and then ran pump program no problem-=no pushing From tberg at snf.stanford.edu Tue Jun 12 13:57:46 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 12 Jun 2007 13:57:46 -0700 Subject: Comment thermcopoly1 SNF 2007-06-12 13:57:45: No Communication Message-ID: Tube had lost comm to system. Reset tube computer did boat cal and temp cal loaded recipe From maurice at snf.stanford.edu Tue Jun 12 14:00:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 Jun 2007 14:00:29 -0700 Subject: Problem thermcopoly1 SNF 2007-05-25 14:31:04: O2 levels in Poly Message-ID: We do not believe the O2 issue on Tylanpoly is a concern on Thermcopoly. Tylanpoly has had "O" ring issues that may have been the cause of the higher O2 readings. From king at snf.stanford.edu Wed Jun 13 00:03:22 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 13 Jun 2007 00:03:22 -0700 Subject: Comment thermcopoly1 SNF 2007-06-13 00:03:22: Normal deposition following breaker problem Message-ID: There was a problem around noon with a heater coil breaker turning off (Ted has the details) After he reset the system (quick work, thanks!) everything ran well and the 580C phos deposition looks normal. From tberg at snf.stanford.edu Wed Jun 13 09:57:27 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2007 09:57:27 -0700 Subject: Shutdown thermcopoly1 SNF 2007-06-13 09:57:27: Burnbox problem Message-ID: From tberg at snf.stanford.edu Wed Jun 13 10:32:51 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2007 10:32:51 -0700 Subject: Comment thermcopoly1 SNF 2007-06-13 10:32:51: AC wiring burned Message-ID: From tberg at snf.stanford.edu Thu Jun 14 12:35:34 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 12:35:34 -0700 Subject: Comment thermcopoly1 SNF 2007-05-28 10:46:07: dep rate normal Message-ID: noted From tberg at snf.stanford.edu Thu Jun 14 12:36:08 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 12:36:08 -0700 Subject: Comment thermcopoly1 SNF 2007-06-12 13:57:45: No Communication Message-ID: Rebooted tubecomputer and did boat and temp cals From tberg at snf.stanford.edu Thu Jun 14 12:36:32 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 12:36:32 -0700 Subject: Shutdown thermcopoly1 SNF 2007-06-13 09:57:27: Burnbox problem Message-ID: Replaced plug and socket OK now From tberg at snf.stanford.edu Thu Jun 14 12:36:46 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 12:36:46 -0700 Subject: Comment thermcopoly1 SNF 2007-06-13 10:32:51: AC wiring burned Message-ID: Repaired wiring From tberg at snf.stanford.edu Thu Jun 14 12:36:57 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 12:36:57 -0700 Subject: Comment thermcopoly1 SNF 2007-06-13 00:03:22: Normal deposition following breaker problem Message-ID: noted From kimsora at snf.stanford.edu Sat Jun 23 21:21:16 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 23 Jun 2007 21:21:16 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 21:21:16: cannot get the boat out! Message-ID: I ran P550B2H6. The process stopped at BTSTAL3 and never moved to the next step. Also, I could see 'HSP fail' on the screen. From kimsora at snf.stanford.edu Sat Jun 23 21:21:58 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 23 Jun 2007 21:21:58 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 21:21:58: my wafers are stuck inside. Message-ID: Please take out and put them in the box next to the furnace. From kimsora at snf.stanford.edu Sat Jun 23 22:25:11 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 23 Jun 2007 22:25:11 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 22:25:10: the boat was pulled out. Message-ID: Ran POLYOUT. Finally, the boat came out. But, it did not come all the way out. It stopped around the middle. From kimsora at snf.stanford.edu Sat Jun 23 22:27:38 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 23 Jun 2007 22:27:38 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 22:27:38: STBYPOLY does not work. Message-ID: It is stuck at BOATIN step. From tberg at snf.stanford.edu Mon Jun 25 07:10:33 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:10:33 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 21:21:58: my wafers are stuck inside. Message-ID: already out From tberg at snf.stanford.edu Mon Jun 25 07:11:07 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:11:07 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 22:25:10: the boat was pulled out. Message-ID: did boat cal and tested operation From tberg at snf.stanford.edu Mon Jun 25 07:11:40 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:11:40 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 22:27:38: STBYPOLY does not work. Message-ID: did boat cal and ran stbypoly From tberg at snf.stanford.edu Mon Jun 25 07:12:26 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:12:26 -0700 Subject: Problem thermcopoly1 SNF 2007-06-23 21:21:16: cannot get the boat out! Message-ID: did boat cal and cycled boat in and out no problem From maurice at snf.stanford.edu Tue Jun 26 14:49:22 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Jun 2007 14:49:22 -0700 Subject: Comment thermcopoly1 SNF 2007-06-26 14:49:22: boat drive motor always on Message-ID: From kimsora at snf.stanford.edu Tue Jun 26 19:11:03 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Tue, 26 Jun 2007 19:11:03 -0700 Subject: Problem thermcopoly1 SNF 2007-06-26 19:11:03: The boat is not closed. Message-ID: Pushed the boat, but it came out again and stopped. Base pressure check always fails. From tberg at snf.stanford.edu Wed Jun 27 14:29:11 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Jun 2007 14:29:11 -0700 Subject: Problem thermcopoly1 SNF 2007-06-26 19:11:03: The boat is not closed. Message-ID: Did Boat Cal and Ran STBY poly no Problem