Problem thermcopoly1 SNF 2007-03-21 00:17:55: Deposition is getting thick on boats

king at snf.stanford.edu king at snf.stanford.edu
Wed Mar 21 00:17:56 PDT 2007


One of the 4" boats is not really usable because wafers don't fit in the slots and the other one is starting to grab your wafers.  One of our device wafers was broken.  




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