From mislam at snf.stanford.edu Wed May 2 11:13:01 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 2 May 2007 11:13:01 -0700 Subject: Problem thermcopoly1 SNF 2007-05-02 11:13:01: loader needs calibration Message-ID: While running P620POLY found loader stop further back from home position and stops short of tube while going in. If pushed to the tube computer comes up with BTSTAL (?) error, then process would not start. Loader motor seems to be running when this happens. From tberg at snf.stanford.edu Thu May 3 09:04:46 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2007 09:04:46 -0700 Subject: Problem thermcopoly1 SNF 2007-05-02 11:13:01: loader needs calibration Message-ID: calibrated bl ran ok From tberg at snf.stanford.edu Thu May 3 09:05:09 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2007 09:05:09 -0700 Subject: Problem thermcopoly1 SNF 2007-04-29 16:38:52: BOAT IN problem Message-ID: recaled From shott at snf.stanford.edu Sat May 19 08:23:28 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 May 2007 08:23:28 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-19 08:23:27: Needs restart after power failure ... Message-ID: From tberg at snf.stanford.edu Mon May 21 09:42:48 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 May 2007 09:42:48 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-19 08:23:27: Needs restart after power failure ... Message-ID: Updated tube, boat cal,8mv cal, loaded standby From king at snf.stanford.edu Mon May 21 21:54:17 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 21 May 2007 21:54:17 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-21 21:54:16: Fails leak check Message-ID: Pumps to about 50mt, leaks above 500mT and fails. Have wiped the seal etc and re-tried it three times. From seymour at snf.stanford.edu Tue May 22 11:47:20 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 11:47:20 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-21 21:54:16: Fails leak check Message-ID: Mike replaced pump port and t/c orings passed leak check, needs test From seymour at snf.stanford.edu Tue May 22 11:48:28 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 11:48:28 -0700 Subject: Problem thermcopoly1 SNF 2007-05-22 11:48:27: needs test after repair. Message-ID: orings replaced leak check passed. From king at snf.stanford.edu Tue May 22 15:57:07 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 22 May 2007 15:57:07 -0700 Subject: Problem thermcopoly1 SNF 2007-05-22 15:57:07: Poly test: Silane is failing Message-ID: MFC is only flowing 14 of 150 sccm SiH4. From king at snf.stanford.edu Tue May 22 20:45:21 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 22 May 2007 20:45:21 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-22 20:45:20: Shutdown for silane flow. Message-ID: From tberg at snf.stanford.edu Wed May 23 07:01:45 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 23 May 2007 07:01:45 -0700 Subject: Problem thermcopoly1 SNF 2007-05-22 11:48:27: needs test after repair. Message-ID: From mdickey at snf.stanford.edu Thu May 24 07:55:19 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 24 May 2007 07:55:19 -0700 Subject: Comment thermcopoly1 SNF 2007-05-24 07:55:19: MFC Message-ID: Silane MFC is bad. From tberg at snf.stanford.edu Fri May 25 07:49:50 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 May 2007 07:49:50 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-22 20:45:20: Shutdown for silane flow. Message-ID: Replaced Si H4 MFC flow is fine across the range From tberg at snf.stanford.edu Fri May 25 07:50:24 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 May 2007 07:50:24 -0700 Subject: Problem thermcopoly1 SNF 2007-05-22 15:57:07: Poly test: Silane is failing Message-ID: Replace SiH4 mfc and checked flow across the reange From tberg at snf.stanford.edu Fri May 25 07:50:53 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 May 2007 07:50:53 -0700 Subject: Comment thermcopoly1 SNF 2007-05-24 07:55:19: MFC Message-ID: Replaced MFC From tberg at snf.stanford.edu Fri May 25 10:10:21 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 May 2007 10:10:21 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-25 10:10:20: Changing MFC Message-ID: From tberg at snf.stanford.edu Fri May 25 14:17:57 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 May 2007 14:17:57 -0700 Subject: Shutdown thermcopoly1 SNF 2007-05-25 10:10:20: Changing MFC Message-ID: Replaced MFC and checked flows From tberg at snf.stanford.edu Fri May 25 14:18:37 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 May 2007 14:18:37 -0700 Subject: Problem thermcopoly1 SNF 2007-05-25 14:18:36: Needs dummy run or test after MFC change Message-ID: From maurice at snf.stanford.edu Fri May 25 14:31:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 May 2007 14:31:04 -0700 Subject: Problem thermcopoly1 SNF 2007-05-25 14:31:04: O2 levels in Poly Message-ID: Arvind Kamath of Kovio reports: " We recently ran SIMS on undoped poly (tylanpoly) and found 3% oxygen levels (This is ~ 10X compared to earlier results)." At this time we don't when the deposition was made. We will run wafers on both poly tubes (they share a common gas line) and send them out to check the O2 level. Once we have more information we with share it with you. From sanjah at snf.stanford.edu Mon May 28 10:46:08 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Mon, 28 May 2007 10:46:08 -0700 Subject: Comment thermcopoly1 SNF 2007-05-28 10:46:07: dep rate normal Message-ID: for P550B2H6 recipe (B2H6=10) From tberg at snf.stanford.edu Tue May 29 06:19:10 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2007 06:19:10 -0700 Subject: Problem thermcopoly1 SNF 2007-05-25 14:18:36: Needs dummy run or test after MFC change Message-ID: Sanja says OK