Problem thermcopoly1 SNF 2007-05-25 14:31:04: O2 levels in Poly

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri May 25 14:31:04 PDT 2007


Arvind Kamath of Kovio reports:
" We recently ran SIMS on undoped poly (tylanpoly) and found 3% oxygen levels (This is ~ 10X compared to earlier results)."
At this time we don't  when the deposition was made.
We will run wafers on both poly tubes (they share a common gas line) and send them out to check the O2 level.
Once we have more information we with share it with you.




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