From kimsora at snf.stanford.edu Sat Nov 3 14:10:24 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 3 Nov 2007 14:10:24 -0700 Subject: Problem thermcopoly1 SNF 2007-11-03 14:10:23: the tube does not go in! Message-ID: & leakcheck fail. the leak check failed. I ran polyout. After the boat out, the boat does not go in. From masaharu at snf.stanford.edu Sun Nov 4 04:42:54 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 4 Nov 2007 04:42:54 -0800 Subject: Problem thermcopoly1 SNF 2007-11-04 04:42:53: Pump down Message-ID: I tried to recover from leak fail. After STBYPOLY run, tube didn't go to low pressure. Pump is down. From tberg at snf.stanford.edu Mon Nov 5 07:12:41 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Nov 2007 07:12:41 -0800 Subject: Shutdown thermcopoly1 SNF 2007-11-05 07:12:41: not pumping Message-ID: From tberg at snf.stanford.edu Mon Nov 5 15:02:48 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Nov 2007 15:02:48 -0800 Subject: Comment thermcopoly1 SNF 2007-11-05 15:02:48: Pump oput for repair Message-ID: From seymour at snf.stanford.edu Wed Nov 14 14:06:58 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Nov 2007 14:06:58 -0800 Subject: Comment thermcopoly1 SNF 2007-11-05 15:02:48: Pump oput for repair Message-ID: pump is back and installed From seymour at snf.stanford.edu Wed Nov 14 14:09:46 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Nov 2007 14:09:46 -0800 Subject: Comment thermcopoly1 SNF 2007-11-14 14:09:46: pump is running Message-ID: pump is installed. ISO valve is open and pump line pressure is 5 to 7 mTorr depending on which T/C gage avove ISO valve you read. system needs to be pump purged, for a while then tested. From maurice at snf.stanford.edu Thu Nov 15 09:53:11 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Nov 2007 09:53:11 -0800 Subject: Comment thermcopoly1 SNF 2007-11-15 09:53:10: testing after pump repair Message-ID: From maurice at snf.stanford.edu Thu Nov 15 12:10:35 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Nov 2007 12:10:35 -0800 Subject: Shutdown thermcopoly1 SNF 2007-11-05 07:12:41: not pumping Message-ID: running test after pump was replaced From maurice at snf.stanford.edu Thu Nov 15 12:11:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Nov 2007 12:11:02 -0800 Subject: Problem thermcopoly1 SNF 2007-11-03 14:10:23: the tube does not go in! Message-ID: pump rebuilt From maurice at snf.stanford.edu Thu Nov 15 17:08:35 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Nov 2007 17:08:35 -0800 Subject: Comment thermcopoly1 SNF 2007-11-15 09:53:10: testing after pump repair Message-ID: ran P580poly 00:45:00 expected 2300 Actual 2112 green light From maurice at snf.stanford.edu Thu Nov 15 17:08:52 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Nov 2007 17:08:52 -0800 Subject: Comment thermcopoly1 SNF 2007-11-14 14:09:46: pump is running Message-ID: logged From maurice at snf.stanford.edu Thu Nov 15 17:09:11 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Nov 2007 17:09:11 -0800 Subject: Problem thermcopoly1 SNF 2007-11-04 04:42:53: Pump down Message-ID: pump rebuilt From king at snf.stanford.edu Thu Nov 15 23:24:30 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 15 Nov 2007 23:24:30 -0800 Subject: Problem thermcopoly1 SNF 2007-11-15 23:24:29: Same loader problems as on 10/17/07 Message-ID: See RIK's report and previous. Boat loader motor continues to run in opposite direction during process and sounds strained. Hopefully there's a spare ready to replace it. It took four attempts (a lot of wasted time), to get this to pump down and it only did because several newly trained users told me that pushing on the door assembly is the standard operating procedure. I believe the gate opens up fully after a set period of time following the soft pump, not after meeting a pressure setpoint, so anyone pushing the door after that could potentially shock and damage the tube. From seymour at snf.stanford.edu Fri Nov 16 13:38:31 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Nov 2007 13:38:31 -0800 Subject: Problem thermcopoly1 SNF 2007-11-15 23:24:29: Same loader problems as on 10/17/07 Message-ID: Ted found loader trying to open door with tube pumped down so he turned off loader motor. At 1:10 we went in and vented tube turned on loader motor and opened tube. did boat cal and checked loader operation and it performed as it should. Left door closed but tube not pumped as Robin was to be in at 1:00 pm to get the wafers. From king at snf.stanford.edu Sat Nov 17 00:31:25 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 17 Nov 2007 00:31:25 -0800 Subject: Comment thermcopoly1 SNF 2007-11-17 00:31:24: Seems to be a miscommunication Message-ID: I was asked by staff if my wafers could come out earlier than expected so maintenance could look at the boat loader (thanks). I wrote back yes, just unload them into a clean cassette so one of us could load them next clean into a furnace anneal. Not sure where the 1pm idea came from or why I would pump down the tube after maintenance was finished. Oh well. From maurice at snf.stanford.edu Wed Nov 28 17:32:14 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Nov 2007 17:32:14 -0800 Subject: Comment thermcopoly1 SNF 2007-11-28 17:32:13: boot system Message-ID: User reported that the "DO" key got stuck. The system went to the triple prompt, ">>>" . Ed typed boot and the system initializied. He entered the useername and password and got back to the normal menu screen. Do we need to load any tables or run the boat cal? From tberg at snf.stanford.edu Thu Nov 29 09:54:12 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Nov 2007 09:54:12 -0800 Subject: Comment thermcopoly1 SNF 2007-11-17 00:31:24: Seems to be a miscommunication Message-ID: Noted From tberg at snf.stanford.edu Thu Nov 29 10:27:22 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Nov 2007 10:27:22 -0800 Subject: Comment thermcopoly1 SNF 2007-11-28 17:32:13: boot system Message-ID: Replaced Keyboard and tested