Problem thermcopoly1 SNF 2007-10-03 12:40:30: Tube is not pumping down

rik at snf.stanford.edu rik at snf.stanford.edu
Wed Oct 3 12:40:31 PDT 2007


Running recipe P580PH3 with 8 sccm of PH3. The tube pressure does not drop during the first PUMP step.




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