From king at snf.stanford.edu Tue Jun 3 21:07:30 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 3 Jun 2008 21:07:30 -0700 Subject: Problem thermcopoly1 SNF 2008-06-03 21:07:29: Boat loader Message-ID: It doesn't close all the way and fails leak. Finally got it to close and am running now. From king at snf.stanford.edu Fri Jun 6 10:55:31 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 6 Jun 2008 10:55:31 -0700 Subject: Problem thermcopoly1 SNF 2008-06-06 10:55:28: Process failed part way through run Message-ID: On that last run with the boat loader problem, it turns out the deposition was aborted. Error msg: Boat Stall. Tube went into deposition and then failed sometime after deposition began. Got only about 15% of expected deposition. Could you please adjust the boat loader today, before the weekend? THANKS. From king at snf.stanford.edu Fri Jun 6 10:57:23 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 6 Jun 2008 10:57:23 -0700 Subject: Shutdown thermcopoly1 SNF 2008-06-06 10:57:23: Shutdown for safety Message-ID: See problem report above. From seymour at snf.stanford.edu Fri Jun 6 13:53:11 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 Jun 2008 13:53:11 -0700 Subject: Problem thermcopoly1 SNF 2008-06-06 10:55:28: Process failed part way through run Message-ID: vented tube and did boat cal. checked halfgate valve operation and it was ok.I will put the tube to problem. From seymour at snf.stanford.edu Fri Jun 6 13:53:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 Jun 2008 13:53:57 -0700 Subject: Shutdown thermcopoly1 SNF 2008-06-06 10:57:23: Shutdown for safety Message-ID: there is not a safety issue with this tube at this time. From seymour at snf.stanford.edu Fri Jun 6 13:57:58 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 Jun 2008 13:57:58 -0700 Subject: Problem thermcopoly1 SNF 2008-06-06 13:57:58: door issues Message-ID: the door alignment was checked and tweeked a bit. Door closes and slo pump starts tube evacuation. leaving the tube on yellow as a caution to users to verify tube pumps down at recipe start. From maurice at snf.stanford.edu Fri Jun 6 15:36:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jun 2008 15:36:46 -0700 Subject: Comment thermcopoly1 SNF 2008-06-06 15:36:45: Message-ID: From maurice at snf.stanford.edu Fri Jun 6 15:54:50 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jun 2008 15:54:50 -0700 Subject: Comment thermcopoly1 SNF 2008-06-06 15:54:49: Higher dep rates Message-ID: P580poly 00:45:00 expected 1600A actual 2287 (run by Maurice on 5/30/08) P580PH3 01:32:00 PH3=8 expected 880A actual 1014 (run by Robin on 6/2/08) P580PH3 01:32:00 PH3=8 expected 1350A actual 2200 (run by Maurice/Caner on 6/3/08) From king at snf.stanford.edu Tue Jun 10 00:26:23 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 10 Jun 2008 00:26:23 -0700 Subject: Comment thermcopoly1 SNF 2008-06-10 00:26:22: Dep rate still higher than normal Message-ID: FYI- I ran another test run and got 10.38A/min using P580PH3, PH3= 8 for a time of 01:18:00. Thickness came to 809.4A avg after 30 min 950C anneal in Tylan1. Usual thickness is around 866A and 9.4A/min. Other users hare reporting high dep rates. Configuration was five thermal oxide test wafers plus three tube dummies, using the 'backward-leaning' boat (top leans toward the front of the tube) in the center position with single spacing ,i.e. no empty slots in between. From king at snf.stanford.edu Tue Jun 10 00:29:29 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 10 Jun 2008 00:29:29 -0700 Subject: Comment thermcopoly1 SNF 2008-06-10 00:29:28: note Message-ID: the normal time needed to get about 866A (after anneal) is 01:32:00. From king at snf.stanford.edu Wed Jun 11 01:35:24 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 11 Jun 2008 01:35:24 -0700 Subject: Comment thermcopoly1 SNF 2008-06-11 01:35:24: Dep rate is better Message-ID: P580PH3 recipe with 8sccm PH3 has dropped to 9.71A/min, down from 10.38A/min, with 14 wfs total. It's closer to normal, not quite there yet. Any ideas what's caused the fluctuations? From king at snf.stanford.edu Mon Jun 16 20:24:51 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 16 Jun 2008 20:24:51 -0700 Subject: Shutdown thermcopoly1 SNF 2008-06-16 20:24:51: Fails leak check Message-ID: Keeps failing leak check. it pumps down to 16mT but then zooms up to 82mTor more. My 11 thermal oxide wafers are loaded so please keep clean if possible. This was actually a test run to look at the high dep rate, anneals and unexplained poly defects. From king at snf.stanford.edu Wed Jun 18 01:01:51 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 18 Jun 2008 01:01:51 -0700 Subject: Comment thermcopoly1 SNF 2008-06-18 01:01:49: status report Message-ID: Trying to plan work schedule; an estimate for up date would be helpful. Thanks. From seymour at snf.stanford.edu Wed Jun 18 15:33:59 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 18 Jun 2008 15:33:59 -0700 Subject: Comment thermcopoly1 SNF 2008-06-18 15:33:59: tube leak rate high Message-ID: I am trying to locate the source of the leak. I have replaced the t/c port oring and the slow pump valve. I removed the loader bellows and replaced the oring. Leak rate still high. I am waiting for another bellows due in tomorrow. From seymour at snf.stanford.edu Thu Jun 19 12:04:40 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Jun 2008 12:04:40 -0700 Subject: Shutdown thermcopoly1 SNF 2008-06-16 20:24:51: Fails leak check Message-ID: replaced oring on T/C sheath and on both ends of loader bellows. Polished loader bellows flanges. Tube pumped down to 14 mT and leak rate was good at 41/min. From seymour at snf.stanford.edu Thu Jun 19 12:05:02 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Jun 2008 12:05:02 -0700 Subject: Problem thermcopoly1 SNF 2008-06-19 12:05:01: needs test after repair Message-ID: From seymour at snf.stanford.edu Thu Jun 19 12:07:48 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Jun 2008 12:07:48 -0700 Subject: Comment thermcopoly1 SNF 2008-06-18 15:33:59: tube leak rate high Message-ID: leak rate ok now From seymour at snf.stanford.edu Thu Jun 19 12:08:16 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Jun 2008 12:08:16 -0700 Subject: Comment thermcopoly1 SNF 2008-06-18 01:01:49: status report Message-ID: tube needs test From seymour at snf.stanford.edu Thu Jun 19 12:09:01 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Jun 2008 12:09:01 -0700 Subject: Problem thermcopoly1 SNF 2008-06-06 13:57:58: door issues Message-ID: these have been resolved From seymour at snf.stanford.edu Thu Jun 19 12:09:39 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Jun 2008 12:09:39 -0700 Subject: Comment thermcopoly1 SNF 2008-06-06 15:36:45: Message-ID: no reply nessary From sanjah at snf.stanford.edu Sat Jun 28 16:11:29 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Sat, 28 Jun 2008 16:11:29 -0700 Subject: Problem thermcopoly1 SNF 2008-06-28 16:11:29: Leak check fails Message-ID: From tberg at snf.stanford.edu Mon Jun 30 07:30:45 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jun 2008 07:30:45 -0700 Subject: Problem thermcopoly1 SNF 2008-06-28 16:11:29: Leak check fails Message-ID: Ran Standby poly 2 times it passed leak check both times no problem From tberg at snf.stanford.edu Mon Jun 30 13:30:57 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jun 2008 13:30:57 -0700 Subject: Shutdown thermcopoly1 SNF 2008-06-30 13:30:56: boat stall Message-ID: When i came in Sih4 was off and B2h6 was on it was in boat stall and pressure was at 675 Mt From tberg at snf.stanford.edu Mon Jun 30 13:54:36 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jun 2008 13:54:36 -0700 Subject: Shutdown thermcopoly1 SNF 2008-06-30 13:30:56: boat stall Message-ID: Aborted run , did boat cal ran standby no problem From tberg at snf.stanford.edu Mon Jun 30 13:55:41 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jun 2008 13:55:41 -0700 Subject: Problem thermcopoly1 SNF 2008-06-30 13:55:41: Watch boat loader Message-ID: If it's making noise after it pumps down there may be a problem and you may get boat stalls