Comment thermcopoly1 SNF 2008-06-10 00:26:22: Dep rate still higher than normal

king at snf.stanford.edu king at snf.stanford.edu
Tue Jun 10 00:26:23 PDT 2008


FYI-  I ran another test run and got 10.38A/min using P580PH3, PH3= 8 for a time of 01:18:00.  Thickness came to 809.4A avg after 30 min 950C anneal in Tylan1.  
Usual thickness is around 866A and 9.4A/min.  Other users hare reporting high dep rates.   
Configuration was five thermal oxide test wafers plus three tube dummies, using the 'backward-leaning' boat (top leans toward the front of the tube)  in the center position with single spacing ,i.e. no empty slots in between. 




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