Comment thermcopoly1 SNF 2008-06-11 01:35:24: Dep rate is better

king at snf.stanford.edu king at snf.stanford.edu
Wed Jun 11 01:35:24 PDT 2008


P580PH3 recipe with 8sccm PH3 has dropped to 9.71A/min, down from 10.38A/min, with 14 wfs total.  It's closer to normal, not quite there yet.  Any ideas what's caused the fluctuations?




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