Shutdown thermcopoly1 SNF 2008-06-16 20:24:51: Fails leak check

king at snf.stanford.edu king at snf.stanford.edu
Mon Jun 16 20:24:51 PDT 2008


Keeps failing leak check.  it pumps down to 16mT but then zooms up to 82mTor more. 
My 11 thermal oxide wafers are loaded so please keep clean if possible.  This was actually a test run to look at the high dep rate, anneals and unexplained poly defects. 




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