From king at snf.stanford.edu Mon May 5 18:18:16 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 5 May 2008 18:18:16 -0700 Subject: Problem thermcopoly1 SNF 2008-05-05 18:18:16: wand is weak Message-ID: it's starting to drop wafers. From tberg at snf.stanford.edu Thu May 8 09:40:46 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 8 May 2008 09:40:46 -0700 Subject: Problem thermcopoly1 SNF 2008-05-05 18:18:16: wand is weak Message-ID: checked wand moved both 4 and 6" wafers hose may have been kinked From tura at snf.stanford.edu Mon May 26 09:35:23 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Mon, 26 May 2008 09:35:23 -0700 Subject: Problem thermcopoly1 SNF 2008-05-26 09:35:23: leakfail during standby Message-ID: I tried to run STBYPOLY after a fine deposition and it failed 3 times in a row. Now it is in the "leakfail" state. From maryamzm at snf.stanford.edu Tue May 27 02:21:09 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Tue, 27 May 2008 02:21:09 -0700 Subject: Problem thermcopoly1 SNF 2008-05-27 02:21:09: LEAKFAIL Message-ID: I tried polyout recipe followed by standby recipe twice but both times the tube failed leak check. From seymour at snf.stanford.edu Tue May 27 09:15:21 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 27 May 2008 09:15:21 -0700 Subject: Shutdown thermcopoly1 SNF 2008-05-27 09:15:20: pulling tube and replacing tube and t/c sheath Message-ID: From seymour at snf.stanford.edu Thu May 29 08:59:55 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 29 May 2008 08:59:55 -0700 Subject: Comment thermcopoly1 SNF 2008-05-29 08:59:54: tube change completed. Message-ID: the tube leak check passed. Waiting for quartz ware and a coat. From maurice at snf.stanford.edu Fri May 30 13:37:52 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 May 2008 13:37:52 -0700 Subject: Comment thermcopoly1 SNF 2008-05-30 13:37:52: coating Message-ID: Coating after pull and clean From maurice at snf.stanford.edu Fri May 30 13:59:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 May 2008 13:59:27 -0700 Subject: Problem thermcopoly1 SNF 2008-05-27 02:21:09: LEAKFAIL Message-ID: pulled tube and replaced tube and t/c sheatht From maurice at snf.stanford.edu Fri May 30 13:59:53 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 May 2008 13:59:53 -0700 Subject: Problem thermcopoly1 SNF 2008-05-26 09:35:23: leakfail during standby Message-ID: tube pulled From maurice at snf.stanford.edu Fri May 30 16:54:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 May 2008 16:54:19 -0700 Subject: Comment thermcopoly1 SNF 2008-05-30 13:37:52: coating Message-ID: coating complete From maurice at snf.stanford.edu Fri May 30 16:54:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 May 2008 16:54:47 -0700 Subject: Comment thermcopoly1 SNF 2008-05-29 08:59:54: tube change completed. Message-ID: quartz installed and coating complete From maurice at snf.stanford.edu Fri May 30 16:59:23 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 May 2008 16:59:23 -0700 Subject: Shutdown thermcopoly1 SNF 2008-05-27 09:15:20: pulling tube and replacing tube and t/c sheath Message-ID: pulled coated cleaned and tested Ran p580poly for 00:45:00 expected ~1700 Ang c 2287 t 2318 b 2287 l 2315 r 2318 You may want to run a test if your work is critical. From maurice at snf.stanford.edu Fri May 30 16:59:40 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 May 2008 16:59:40 -0700 Subject: Problem thermcopoly1 SNF 2008-05-30 16:59:40: System up Message-ID: pulled coated cleaned and tested Ran p580poly for 00:45:00 expected ~1700 Ang c 2287 t 2318 b 2287 l 2315 r 2318 You may want to run a test if your work is critical.