From king at snf.stanford.edu Wed Sep 3 19:11:07 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 3 Sep 2008 19:11:07 -0700 Subject: Problem thermcopoly1 SNF 2008-09-03 19:11:06: Door isn't working Message-ID: It pushes back out. It's currently at atm, might try again later. From king at snf.stanford.edu Wed Sep 3 22:17:23 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 3 Sep 2008 22:17:23 -0700 Subject: Problem thermcopoly1 SNF 2008-09-03 22:17:23: Leakfail / door problem, Message-ID: The second door/pump failure. Needs adjustment. It's not pumped down, I'm finished trying to make it work. From tberg at snf.stanford.edu Thu Sep 4 07:03:54 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 07:03:54 -0700 Subject: Problem thermcopoly1 SNF 2008-09-03 22:17:23: Leakfail / door problem, Message-ID: did boat cal put in standby program From tberg at snf.stanford.edu Thu Sep 4 07:04:04 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 07:04:04 -0700 Subject: Problem thermcopoly1 SNF 2008-09-03 19:11:06: Door isn't working Message-ID: did boat cal put in standby program From tberg at snf.stanford.edu Thu Sep 4 07:04:40 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 07:04:40 -0700 Subject: Comment thermcopoly1 SNF 2008-08-18 15:48:31: Brought back uop afterpower fail Message-ID: Noted From maryamzm at snf.stanford.edu Sun Sep 7 11:00:52 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Sun, 7 Sep 2008 11:00:52 -0700 Subject: Shutdown thermcopoly1 SNF 2008-09-07 11:00:51: HSP Fail Message-ID: Looks like Thermcopoly aborted in the middle of deposition...says "HSP fail" It also says Boat Stalled. SiH4, PH3, and CLP are all flashing red...I'm not sure if it is safe to open the tube so I just left my wafers in there. From tberg at snf.stanford.edu Mon Sep 8 09:30:58 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Sep 2008 09:30:58 -0700 Subject: Shutdown thermcopoly1 SNF 2008-09-07 11:00:51: HSP Fail Message-ID: Reset computer, did boat and temp cal, loaded standby recipe no problem. May be related to CDA loss From king at snf.stanford.edu Thu Sep 18 23:48:14 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 18 Sep 2008 23:48:14 -0700 Subject: Shutdown thermcopoly1 SNF 2008-09-18 23:48:13: boat loader and leak check failures Message-ID: It takes multiple attempts to make it pump down. It's currently not pumped after failing leak check twice in STBYPOLY (plus three times for the dep recipe). This seems to be a recurring problem. From maurice at snf.stanford.edu Mon Sep 22 15:37:31 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Sep 2008 15:37:31 -0700 Subject: Shutdown thermcopoly1 SNF 2008-09-18 23:48:13: boat loader and leak check failures Message-ID: ran boat cal door now closes properly and pumps down with no problem From tberg at snf.stanford.edu Mon Sep 29 06:43:09 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Sep 2008 06:43:09 -0700 Subject: Shutdown thermcopoly1 SNF 2008-09-29 06:43:09: Monitor bad Message-ID: From tberg at snf.stanford.edu Mon Sep 29 07:31:04 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Sep 2008 07:31:04 -0700 Subject: Shutdown thermcopoly1 SNF 2008-09-29 06:43:09: Monitor bad Message-ID: Monitor was dead Replaced with the one from bank 2