Shutdown thermcopoly1 SNF 2008-09-07 11:00:51: HSP Fail

maryamzm at snf.stanford.edu maryamzm at snf.stanford.edu
Sun Sep 7 11:00:52 PDT 2008


Looks like Thermcopoly aborted in the middle of deposition...says "HSP fail" It also says Boat Stalled.  SiH4, PH3, and CLP are all flashing red...I'm not sure if it is safe to open the tube so I just left my wafers in there. 




More information about the thermcopoly1-pcs mailing list