From fanpy at snf.stanford.edu Thu Aug 13 18:55:05 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Thu, 13 Aug 2009 18:55:05 -0700 Subject: Problem thermcopoly1 SNF 2009-08-13 18:55:05: LEAKFAIL Message-ID: When I came on the tool, it said "leakfail" during stbypoly process. When I was running my recipe for the first time, still leakfail. Did boat cal and tried again. Same problem. It didn't even go to the leak check step yet, "leakfail" showed up at the end of base pressure step and at that time, the tube pressure is still above 1000, looking like it's not been pumping at all. From fanpy at snf.stanford.edu Thu Aug 13 19:25:29 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Thu, 13 Aug 2009 19:25:29 -0700 Subject: Shutdown thermcopoly1 SNF 2009-08-13 19:25:29: leakfail problem Message-ID: as mentioned. tube pressure 1147 mTorr at end of base pressure phase. From tberg at snf.stanford.edu Fri Aug 14 10:39:14 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 10:39:14 -0700 Subject: Shutdown thermcopoly1 SNF 2009-08-13 19:25:29: leakfail problem Message-ID: Cooled down replaced broken TC sheath leak checked heating back up From tberg at snf.stanford.edu Fri Aug 14 10:39:26 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Aug 2009 10:39:26 -0700 Subject: Problem thermcopoly1 SNF 2009-08-13 18:55:05: LEAKFAIL Message-ID: Cooled down replaced broken TC sheath leak checked heating back up