Problem thermcopoly1 SNF 2009-08-13 18:55:05: LEAKFAIL

fanpy at snf.stanford.edu fanpy at snf.stanford.edu
Thu Aug 13 18:55:05 PDT 2009


When I came on the tool, it said "leakfail" during stbypoly process. When I was running my recipe for the first time, still leakfail. Did boat cal and tried again. Same problem. It didn't even go to the leak check step yet, "leakfail" showed up at the end of base pressure step and at that time, the tube pressure is still above 1000, looking like it's not been pumping at all.




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